Table of contents:
Chapter 1. Introduction to MEMS devices.
Chapter 2. Basic mechanics of beam and diaphragm structures.
Chapter 3. Air Damping.
Chapter 4. Electrostatic Actuation.
Chapter 5. Capacitive Sensing and Effects of Electrical Excitation.
Chapter 6. Piezoresistive Sensing.

Sensors and actuators are part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. This book presents the analysis and design principles of MEMS devices.